Integrated systems for interfacing with substrate container storage systems

ABSTRACT

A storage system and methods for operating a storage system are disclosed. The storage system includes a plurality of storage shelves, and each of storage shelves has a shelf plate for supporting a container. Each of the storage shelves is coupled to a chain to enable horizontal movement and each is further coupled to a rail to enable guiding to one or more positions. A motor is coupled to a drive sprocket for moving the chain. The rail has some sections that are linear and some sections that are nonlinear. The sections are arranged in a loop. Example configurations of the storage system include one or more of stationary shelves, extended horizontal tracks for a hoist, a conveyor at a level of the storage system, and a manual loading station. The hoist, with an extended horizontal track interfaces with the manual loading station.

CLAIM OF PRIORITY

This application is a continuation, under 35 USC §120, of applicationSer. No. 12/780,846, filed on May 14, 2010, and titled “IntegratedSystems for Interfacing with Substrate Container Storage Systems”, whichis a continuation-in-part, under 35 USC §120, of U.S. patent applicationSer. No. 12/780,761, filed on May 14, 2010, now U.S. Pat. No. 8,851,820,and titled “Substrate Container Storage System”, which claims priority,under 35 USC §119(e), to U.S. Provisional Application No. 61/216,570,filed on May 18, 2009, and titled “Horizontal Recirculating StorageSystem for Substrate Containers”, all of which are incorporated byreference herein in their entirety.

The application Ser. No. 12/780,846 claims priority, under 35 USC§119(e), to U.S. Provisional Application No. 61/216,570, filed on May18, 2009, and titled “Horizontal Recirculating Storage System forSubstrate Containers”, and to U.S. Provisional Application No.61/332,802, filed on May 9, 2010, and titled “Improvements to aHorizontal Recirculating Storage System for Substrate Containers”, allof which are incorporated by reference herein in their entirety.

BACKGROUND

There are several ways that semiconductor wafer containers are stored ina semiconductor fabrication facility (“fab”). Large centralized stockerscan store the containers of wafers until they are needed for processing,receiving the containers from a transport system known as an AutomatedMaterial Handling System (“AMHS”) at an input port. In general, an AMHSis any computer controlled system in a factory that moves work piecesbetween work stations, and between work stations and storage locations.In a fab, an AMHS will move containers of wafers and empty containersbetween process equipment, metrology equipment and stockers. Whenprocessing is required for the wafers, they are retrieved in theircontainer from their storage shelf by a robotic mechanism (“stackerrobot”), delivered to an output port on the stocker, picked up by theAMHS, and delivered to the desired processing station. The stacker robottypically requires a large space between the walls of stationary storageshelves. The space is needed to allow for operating clearance and motionof the stacker robot and its container payload. There may also be one ormore ports where human operators can manually deliver and retrievecontainers from the stocker.

To better distribute the storage of containers, smaller stockers may belocated in processing bays of the fab where the containers can be storedcloser to their next processing station, reducing delivery time andtravel distance for the containers when they are requested for the nextprocessing operation. Also, distributing the smaller stockers reducesthe problem of AMHS traffic congestion at the large stockers and thethroughput limitations of the single stacker robot at the large stocker,however the distribution and use of smaller stockers has itslimitations. A smaller stocker still has the elements of a largestocker, including the stacker robot and its operating clearance space,controls, and input/output ports. This duplication makes the small,distributed stockers more costly than the large stockers for the sameoverall number of storage locations. Some fabs are structured withparallel aisles (“bays”) of semiconductor processing, measuring orhandling equipment (“tools”). If multiple small stockers were placed ineach bay adjacent to the tools there would also be an increase in thefloor space used for the fab's storage requirements due to the decreasedstorage density of a small stocker and access clearance required aroundthe stocker and tool. Floor space is very valuable in a fab because itis used for processing tools that manufacture products, therefore it isdesirable to minimize the use of floor space for storage functions.

Therefore, there is a need for container storage systems that are simpleand inexpensive, using minimal floor space, while providing high densitycontainer storage close to processing tools.

SUMMARY OF THE INVENTION

One aspect of the present invention is a compact and simple system forstoring containers in a horizontal plane. The containers are stored onstorage shelves that can be circulated on a loop.

Another aspect of the present invention is to provide a storage systemthat does not use floor space. The system can be installed above floormounted facilities and tools. In some cases, parts or sections of a toolmay be above the storage system, however, the storage system will stillbe above the primary functional part of the tool. For instance, if thetool is one or more load ports, the storage system will still be located“above” the tool, even if some component of the tool is above thestorage system. And, the term “above” should be understood togenerically be a height that is greater than a height of the tool, e.g.,the functional part of the tool. In this manner, the storage system caneither be directly over (e.g., aligned) or not directly over the tool(e.g., not aligned), so long as the storage system is at the height thatis greater than the tool. As used herein, a height can be measuredrelative to reference surface. The “reference surface” is, in oneembodiment, a floor of a room, such as a clean room, factory orlaboratory.

Another aspect of the present invention is to provide a storage systemthat does not interfere with access to floor mounted facilities andtools. The system can be installed between tools but at an elevationabove the tools that allows for the unhindered access to the sides ofthe tools for maintenance and operation.

Another aspect of the present invention is to provide a storage systemthat has a greater container storage density than conventional stockersdue to the elimination of the large clearance space required for astacker robot.

Another aspect of the present invention is to provide a storage systemthat can interface with the AMHS of a fab.

Another aspect of the present invention is to provide a storage systemwith fast access to stored containers.

Another aspect of the present invention is to provide a storage systemwith active ports that can reduce delays in accessing the storedcontainers and provide a flexible interface to an AMHS.

Another aspect of the present invention is to provide a storage systemwith active ports that provides clear access via OHT to a loadport belowwhen the active port is retracted.

Another aspect of the present invention is to provide a storage systemwith multiple levels of storage shelves. Each level of the storagesystem circulates storage shelves on a loop and has one or more activeports.

Yet another aspect of the present invention is to provide a storagesystem that can be mounted above a tool to provide local storage ofcontainers used by the tool.

Still another aspect of the present invention is to provide a storagesystem that uses active ports and a hoist, or other mechanism, totransfer containers between the storage system and the tool without theaid of an AMHS.

Yet another aspect of the present invention is to provide a storagesystem that uses active ports and a hoist, or other mechanism, totransfer containers between the storage system and the tool while stillallowing the AMHS to deliver and retrieve containers to/from the tool.

In one embodiment, a storage system and methods for operating a storagesystem are disclosed. The storage system includes a storage systemassembly positioned at a height that is greater than a height of a toolused for loading and unloading substrates to be processed. The storagesystem locally stores one or more containers of substrates. The storagesystem assembly includes a plurality of storage shelves, and each of theplurality of storage shelves has a shelf plate with shelf features forsupporting a container. Each of the plurality of storage shelves iscoupled to a chain to enable horizontal movement and each is furthercoupled to a rail to enable guiding to one or more positions. A motor iscoupled to a drive sprocket for moving the chain, such that each of theplurality of storage shelves moves together along the rail to the one ormore positions. The rail has at least some sections that are linear andsome sections that are nonlinear and the sections are arranged in aloop.

Example configurations of the storage system can include one or more ofstationary shelves, extended horizontal tracks for hoists, conveyors atthe level of the storage system assembly, and a manual loading station.The hoist, with an extended horizontal track can therefore interfacewith the manual loading station.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a plan view of the present invention including active ports.

FIG. 2 is a plan view of the curved guide rail and bearing truck.

FIG. 3 is a side view of the rail and bearing truck.

FIG. 4 is a plan view of the present invention without active ports.

FIG. 5 is another view of the present invention without active ports.

FIG. 6 is a view of the present invention being loaded by an OverheadTransport (“OHT”) type of AMHS.

FIG. 7 is a side view of a storage shelf with a retracted active port.

FIGS. 8, 9, 10, and 11 show different positions of the active portmechanism.

FIG. 12 is a view of the present invention including active ports.

FIG. 13 is a side view of the present invention including active ports.

FIG. 14 is a view of the present invention including a transfer hoistand active ports.

FIG. 15 is a side view of the present invention including a transferhoist and active ports.

FIG. 16 is a view of a transfer hoist of the present invention.

FIG. 17 is another view of the transfer hoist of the present invention.

FIG. 18 is another view of the present invention with multiple storagelevels.

FIGS. 19a and 19b are plan views of the present invention showingdifferent configurations of active ports and OHT.

FIGS. 20a, 20b, and 20c are elevation views of different configurationsof the present invention with AMHS.

FIGS. 21a, 21b, and 21c are other elevation views of the presentinvention with AMHS.

FIG. 22 is plan view of the floor space used by a conventional stocker.

FIG. 23 is a plan view of the reduced space needed for one embodiment ofthe present invention.

FIG. 24 shows an embodiment where an extended track and hoist isinterfacing with a manual loading station, in accordance with theinvention.

FIG. 25 shows an embodiment where stationary shelves are coupled to thestorage system assembly, in accordance with the invention.

FIG. 26 shows an example side view of FIG. 25, in accordance with theinvention.

FIG. 27 shows an embodiment where the extended track spans more than onetool, in accordance with the invention.

FIG. 28 shows an embodiment where a conveyor is coupled to the storagesystem assembly, in accordance with the invention.

FIG. 29 shows an embodiment of a side view of the conveyor, inaccordance with the invention.

DETAILED DESCRIPTION

The descriptions of the embodiments of this invention describe the useof a Front Opening Unified Pod (“FOUP”) for the storage of semiconductorwafers in a fab, however, the present invention is not limited to FOUPsand/or semiconductor manufacturing. For purposes of describing thisinvention, other examples include wafer containers (with walls andwithout), Substrate containers (with walls and without), cassettes, flatpanel display cassettes, Standard Mechanical Interface (“SMIF”) pods,reticle pods, or any structure for supporting a substrate, whether thestructure supports a single substrate or multiple substrates, or whetherthe structure is in an enclosing container or the structure is open tothe external environment.

One embodiment of the present invention is shown in FIG. 1. Storagesystem 100 has 6 movable storage shelves 110 a-110 f. Each storage shelfis connected to drive chain 111 through a vertical pin that is attachedto a link of the chain. The pin mates with a slot in the underside ofthe storage shelf assembly, however, the slot, which is orientedperpendicular to the direction of chain motion, is large enough to allowthe pin to rotate and slide without binding. The horizontal motion ofthe storage shelves is guided by rail 112 which is engaged with abearing truck under the shelf assembly. Rail 112 has straight sections112 a and curved sections 112 b. As the chain 111 moves it pulls thestorage shelf by engagement of the pin in the slot, while the rail andbearing truck keep the shelf on a constrained path around the ovalconfiguration of rail sections. It should also be understood that theconfiguration of the track need not be “oval”, and many configurationsare possible. In one embodiment, any configuration that defines a loopis envisioned and the loop can have some sections that are linear andsome sections that are non-linear. Accordingly, the oval configurationexample is just that, an example.

There are other methods of engaging the storage shelf with the chain.For example, a sheet metal bracket with a hole or slot could be fastenedto the chain. The hole or slot on the bracket would engage a fixed pinor other feature on the storage shelf. Any other type of engagementhardware would be acceptable if it provided adequate flexibility betweenthe drive chain and the storage shelf while still being able to pull thestorage shelf with the drive chain.

While this embodiment uses sprockets and a drive chain for the drivemeans, other drive components are commercially available and they couldbe used alternatively. These alternate drives include, but are notlimited to; timing belts and pulleys, plastic chain and sprockets, orsteel belts and pulleys. The pulleys can be plastic disks, and the beltscan be plastic, rubber, smooth, ribbed, pebbled, continuous, segmented,etc. In still other embodiments, the belts and pulleys can be configuredbelow the base plate 129 or in its separate compartment to reduce dust.

The storage system in FIG. 1 moves storage shelves in a loop. A loop isa continuous guidance path for a storage shelf that will repeat if movedin any direction. For example, if storage shelf 110 a started in theposition shown in FIG. 1 and drive sprocket was rotated in thecounter-clockwise direction, storage shelf 110 a would pass through thepositions shown for shelves 110 b through 110 f until it returned to itsoriginal starting position, as shown in the figure. All of the shelveswould be moving simultaneously in the same direction in this case, andall must move at the same time. One shelf can not move without havingall shelves move in the loop. The loop shown in FIG. 1 approximates anoval, however, a loop can have any shape and it is possible to have aloop that moves in both directions.

Motor 113 turns drive sprocket 114 through a timing belt (not shown)that allows the motor to be mounted to the side of the sprocket.Alternatively, the motor could have a gearhead and be coupled directlyto the center of the sprocket. Other methods to couple the motor to thesprocket are known in the art and could alternatively be used. The motorin this embodiment is a step motor that moves to its desired positionwithout the feedback of a position measuring device such as an opticalencoder, however, other types of motors could be used, such as abrushless DC servo motor with a rotary encoder. The step motor moves toits desired position by a pre-determined number of small increments inits electrical phases. In this way the step motor can accurately move toits position without a feedback device to measure the position. Abrushless DC servo motor uses a feedback device such as an opticalrotary encoder to control the trajectory of motion, and to stop at thedesired position.

Drive chain 111 wraps around both drive sprocket 114 and idler sprocket115. Base plate 129 provides a support structure for mounting the systemcomponents. Drive sprocket 114 and idler sprocket 115 have bearingassemblies at their centers that connect them to the base plate yetallow them to freely rotate. Motor 113 is connected to the base platewith motor mount 116.

Base plate 129 is shown as a continuous solid plate but represents anyplanar structure that can support the system components. For example,the base plate could be made from multiple plates, or folded sheetmetal,or sheetmetal supported by a frame, or a grid structure of framemembers. The base plate could have substantial vacant areas to allowvertical airflow in a fab cleanroom.

Motor 113 is electrically connected to control circuits (not shown). Thecircuits in this embodiment are a step motor amplifier and amicroprocessor based controller. The step motor amplifier is connectedto the motor wires and provides the drive power to rotate the motor inresponse to control signals from the microprocessor based controller.The microprocessor based controller executes a sequence of programinstructions that control the motion trajectory and position of themotor, and interfaces with external systems such as the fab controlsystem, the tool control system, or a operator interface to determine ifand how the storage shelves should be moved.

Other alternative control circuits could be used to control the motorsuch as a Programmable Logic Controller (“PLC”), a Personal Computer(“PC”) with motor amplifier, or custom designed embedded control PCboard with microprocessor and integrated motor drive circuit.

Another alternative would have one controller, with its own programsequence, controlling the motor, and another controller, with its ownprogram sequence, interfacing with external systems. These twocontrollers would coordinate their operation through serial or parallelcommunication lines. It is possible to have the controls divided amongstany number of separate controllers, however, having one microprocessorbased controller running a single program sequence is the simplest wayto control the complete storage system.

The control circuit can interface with external systems using differentmethods. For example, it could communicate with the fab control networkusing Ethernet following the Semiconductor Equipment and MaterialsInternational (“SEMI”) E88 standard for stocker interface.Alternatively, it could communicate with the fab or tool control systemusing Ethernet or an RS232 type of serial communications. It could evencommunicate with external systems through a set of parallel signallines. The types of communication used in a fab are various and thepresent invention could embody different types depending on the controlarchitecture and needs of the fab.

FIG. 1 also shows active ports 117 and 118 in their retracted position.The active ports are mechanisms that can be used to either load a FOUPon to a storage shelf or unload a FOUP from a storage shelf. The activeport can move horizontally to either the retracted or extended position.The active port can also move the port plate vertically to either anupper or lower position. In the retracted, lower position, port plate119 allows motion of the storage shelves 110 because it rests below theshelf plate 120 and above the bearing plate 121. FIG. 7 shows thevertical clearance between the port plate and storage shelf when theport plate is retracted and in the lower position. This verticalclearance is shown by dashed lines, which define a C-shaped space 120 a.FIG. 1 shows the clearance between the retracted port plate and thestorage shelf when the storage shelf is at one of its stop positions.This clearance allows the port plate to move vertically at the stopposition to either pick up a FOUP from a storage shelf or place a FOUPon a storage shelf.

FIG. 1 shows two active ports, however, any number could be useddepending on the size of the storage system and the configuration of theAMHS. The active ports can also be located on any side of the storagesystem. FIGS. 19a and 19b show plan views of different configurations ofactive ports and OHT. FIG. 19a shows storage system 100 with activeports 117 and 118. Active port 118, at the end of the storage system, isaligned with OHT rail 132 b which supports OHT vehicle 131 b, whileactive port 117, at the side of the storage system, is aligned with OHTrail 132 a, which supports OHT vehicle 131 a. FIG. 19b shows storagesystem 100 with active ports 117, 118, 153, and 154. In FIG. 19b activeports 117 and 118 are aligned with OHT rail 132 a and OHT vehicle 131 a,while active ports 153 and 154 are on the opposite side of the storagesystem, aligned with OHT rail 132 b and OHT vehicle 131 b.

FIGS. 1 and 7 show pins (e.g., features) used to register and retain theposition of the FOUP. Shelf pins 122 engage mating features (e.g., aslot) on the bottom of the FOUP to accurately position and support theFOUP while it is resting on the shelf plate. Port pins 123 engage thesame mating features (e.g., slot) on the bottom of the FOUP toaccurately position and support the FOUP while it is resting on the portplate. The slot allows both pins 122 and 123 to engage the bottom of thecontainer base. However, as shown, the pins 122 and 123, at each of thethree locations, are positioned proximate to one another (see FIG. 1,storage shelf 120 and port plate 119 of 110 b). At a stop position, aFOUP at an active port can have its support transferred from the shelfpins to the port pins by raising the port plate to the upper position.

While FOUPs are designed to have features on their bottom plate for pinengagement, other features can be used to accurately hold a container ona shelf plate or port plate. For example, raised features on the portplate or shelf plate could constrain the outer edge of the bottom of thecontainer or mate with relieved areas on the bottom surface of thecontainer. Thus, it should be understood that other holding featuresother than pins can be used. The holding features can connect, grab,grasp, couple, mate, balance, or engage the container. Also, thecontainer does not have to be a FOUP, and the container can be any open,closed, partially closed/open, and can also hold any size or type ofsubstrate. The port features and the plate features, as claimed, canencompass any type of holding feature, including pins. If the portfeatures are pins, then they are referred to herein as port pins, and ifthe plate features are pins, then they are referred to herein as platepins.

FIGS. 8, 9, 10, and 11 show four positions of the port plate 119 asmoved by the active port assembly 119 a. The active port assembly 119 ais shown detached from the base plate for clarity. In FIG. 8 the portplate 119 is retracted (retracted position) and at the lower position.In FIG. 9 the port plate 119 has been raised to the upper position by avertical motion assembly 119 a-2, as it would be to pick a FOUP off of astorage shelf. The vertical motion can be accomplished in many ways. Byway of example, the vertical motion can be by actuation of verticalpneumatic cylinder 124 and is guided by vertical linear bearings 125.When installed in the storage system, active port base 126 is attachedto base plate 129. Also shown, the port plate 119 has an opening 119 b,which is sufficient to fit around the storage shelf. In one embodiment,this opening defines an space on one side, where the port plate pins canstill be located at ends of the opening and at an opposite side of theopening. In FIG. 10 the port plate 119, which is in the upper position,has been moved horizontally to the extended position using a horizontalmotion assembly 119 a-1. By way of example, the horizontal motionassembly 119 a-1 can include actuation of a horizontal pneumaticcylinder 127 and is guided by horizontal linear bearings 128. In FIG. 10the body of horizontal pneumatic cylinder is under active port base 126and can not be seen, with only the cylinder's actuator rod visible. InFIG. 11 the port plate 119 has moved to its lower position, where it isnow ready to move to the retracted position without concern forcollision with moving shelves or FOUPs.

The vertical and horizontal linear motion of the active port areaccomplished in this embodiment using pneumatic cylinders, however,other drive means known in the art could alternatively be used, such asa ball screw or a leadscrew driven by an electric motor. Anotheralternative drive means would be a rack gear driven by an electric motorwith a spur gear.

Operation of the active ports 117 and 118 would be coordinated with theoperation of motor 113. In this embodiment the active ports arecontrolled by the same control circuits used to control the operation ofmotor 113, however, there are many different configurations for thecontrol circuits. One alternative example would be to have the activeports controlled by one or more microprocessor based controllers, andthese would communicate through parallel or serial signals with themotor control circuits to coordinate functions.

FIGS. 4 and 5 show the storage system with a FOUP 130 loaded on each ofthe storage shelves. The spacing of the shelves is such that as theshelves and FOUPs are moved around the storage system 100, they do notcollide as they turn the corner. Six storage shelves are shown in thesefigures, however, more or less storage shelves, and FOUPs, could beaccommodated by changing the length of the system. The most efficientuse of space would be to leave the curved rail sections 112 b unchanged,and extend the length of the straight rail sections 112 a, along withthe base plate 129 and drive chain 111, however, the length of drivechain for attaching shelves could also be increased by increasing theradius of the curved rail section 112 b at each end along with thediameter of the sprockets 114 and 115. Either method, or a combinationof both, would increase the length of the drive chain, allowing moreshelves to be attached at their minimum spacing.

FIG. 6 shows an OHT vehicle 131 with a FOUP 130 aligned over an emptyshelf 110 a of the storage system, which is located at an elevationabove the tools in the fab. An OHT vehicle can move a FOUP betweenstockers, storage systems and tools using the OHT rail 132 to supportit. The OHT vehicle grips the FOUP by the FOUP top handle 133 using agripper mechanism and travels about the fab at an elevation above thetools. The FOUP is lowered or raised at the stockers, storage systems ortools by using a hoist. The other five storage shelves 110 b-110 f haveFOUPs stored on them, and 110 a is empty. OHT vehicle 131 moves alongOHT rail 132 and stops at a position which is aligned with the stoppedshelf 110 a.

In this position it can lower the FOUP on to shelf 110 a. After the FOUPis lowered on to shelf 110 a, it can retract its hoist and move toanother destination or it can pick up another FOUP from the storagesystem. To pick up another FOUP, the OHT would wait until the desiredFOUP has been moved to the aligned position under the OHT vehicle, lowerits gripper with its hoist, grip the FOUP top handle, raise the FOUP,then proceed to its next destination. The positioning of a new FOUP forpick up is very fast because it only requires the operation of a singlemotor. The storage system control circuits could drive the motor ineither direction to move the FOUP to the aligned position under the OHT,and for minimum delay, it could choose the direction that resulted inthe minimum travel distance.

FIGS. 12 and 13 show the present invention mounted above a tool 135 toprovide local storage for the FOUPs that are scheduled to be processedby the tool. The storage system assembly 100 b of the storage system 100is shown to include a frame 100 c. The frame 100 c may have a structuralcomponent and non-structural components, so long as the frame 100 c canbe attached to a surface of an assembly 200 of the tool (see FIG. 13).The assembly 200 can include parts of the tool only or can also includeadd-on components, panels, electronics, screens, frames, ducts, vents,filters, tracks, pneumatics, circuits, facility connections, framestabilizers, electrical connectors, communications connectors, and thelike. Thus, placing the storage system assembly 100 b over the tool caninclude placing or connecting the storage system assembly 100 b to partsof the tool or components connected to the tool. Also shown, in FIG. 13is that, in one example, the OHT 131 is aligned over the active portplate 119, as well as the tool shelf of tool load ports 134 a. The toolshelf can be a drop or pickup point for the OHT and so can the activeport plate 119, as they are aligned in a zone (e.g., container loadzone) that is configured to receive or supply containers.

OHT vehicle 131 moves along OHT rail 132 until aligned with active port117, active port 118, or any of the tool loadports 134 a, 134 b, or 134c. OHT vehicle 131 is in position to load a FOUP on to empty active port117, which could then retract and lower it on to empty storage shelf 110a, however, other FOUP transfers are possible. For example, with allactive ports retracted, the OHT vehicle could transfer its FOUP to oneof the loadports 134 a, 134 b, or 134 c.

Another example would have the OHT vehicle arrive at the position ofactive port 117 while not carrying a FOUP. Active port 117 could pick upa FOUP from a storage shelf and move to the extended position, where itcould then be grabbed by the OHT gripper and lifted to the OHT vehicle.After active port 117 retracted, the OHT vehicle could then lower theFOUP to one of the loadports 134 a, 134 b, or 134 c.

The storage system could also be used to store empty FOUPs while thewafers originally from the FOUPs are being processed. This allows alarger batch of wafers to be processed at the same time with a limitednumber of tool loadports. In this case, with active ports retracted, theOHT would pick up the empty FOUP from one of the loadports, such asloadport 134 a, lift the empty FOUP to the OHT vehicle, extend an activeport, such as active port 117, then lower the empty FOUP on to theactive port, after which the active port could retract and lower theempty FOUP on to an empty shelf that was aligned with the active port.

In FIGS. 12 and 13 the storage system with active ports is installedabove a tool, however, it is not necessary for it to be above a tool. AnOHT vehicle could access the FOUPs stored in the storage system, usingthe active ports, if the storage system was located anywhere along thepath of the OHT, the only requirement being that the OHT vehicle hoistcould be aligned with the active port when it is extended.

FIGS. 14 and 15 show an embodiment of the present invention where ahoist can transfer FOUPs between the storage system and the tool withoutthe aid of an OHT vehicle. The transfer hoist 136 is shown with transferhoist gripper 140 retracted into transfer hoist frame 142. The transferhoist 136 can also align over an active port plate 119 or over one ormore of the load port shelves. In this embodiment, the transfer hoistextends into the same zone (e.g., container load zone) that the activeport does when extended and the same zone where the shelf of the loadport(s) is located. This allows for efficient transfer using thetransfer hoist 136. An example of having the transfer hoist 136, activeport plate 119, and load port shelf 134 a-1 aligned is shown in FIG. 15.

By way of example, transfer hoist 136 can move laterally along hoistlinear drive 137. The extent of lateral travel includes positionsaligned above active ports 117 and 118, and loadports 134 a, 134 b, and134 c. The linear drive means 139 in the hoist linear drive 137 could beany of the methods known in the art. For example, the linear drive meanscould be a rack gear and electric motor with spur gear, or a horizontalball screw and ball nut driven by an electric motor. The cantileversupport 138 would be guided by one or more linear bearings and connectedto the movable part of the linear drive means 139. The linear bearingsand cantilever support must be rigid enough to keep the transfer hoist136 in a reasonably horizontal plane with the added load of a full FOUP.A flexible cable assembly in the hoist linear drive would allow powerand communication wiring to be connected between the storage system andits control circuits and the control circuits of the transfer hoist.

The OHT vehicle 131 can transfer FOUPs to and from both active ports andall loadports, but it is not necessary for the OHT to transfer FOUPs toand from the loadports. The transfer hoist can transfer FOUPs from thestorage system to the loadports on request from the tool without waitingfor the arrival of an OHT vehicle. The OHT can deliver FOUPs to thestorage system to maintain an inventory of FOUPs to be processed by thetool without regard for the status of the tool loadports. The OHT canpick up processed FOUPs from either the tool loadport or the storagesystem. In one case the processed FOUP could wait on the loadport untilan OHT was available to remove it, if that loadport was not needed tostart processing on a new FOUP. In the other case, where the loadportwith the processed FOUP was needed to start processing on a new FOUP,the processed FOUP could be moved with the transfer hoist to an activeport, which would load it on to an empty storage shelf, then a new FOUPwould be moved from storage shelf to active port to transfer hoist tothe recently vacated loadport.

FIGS. 16 and 17 provide design details for the transport hoist 136. Ingeneral, the transport hoist has many of the same features as the hoistmechanism on an OHT; retracting belts that move a FOUP gripper mechanismbetween a lower elevation and a higher elevation. Hoist frame 142contains electric motors that rotate belt drive pulleys 147, retractingtransfer hoist belts 141 into hoist frame 142. The retracted belt isrolled on to belt wrap pulleys 148 which provide a continuous wraptorque. Transfer hoist belts 141 are connected to transfer hoist gripper140, therefore retraction of the transfer hoist belts into the transferhoist frame results in vertical motion of the transfer hoist gripper.Transfer hoist gripper 140 envelops the periphery of FOUP top handle 133and then gripper latch 146 is activated, positioning the gripper latchunder the bottom edge of the FOUP top handle. With the support of thegripper latch, the FOUP can then be lifted from the support surface ithas been resting on. Power and communication between the transfer hoistframe and the transfer hoist gripper is provided by wires that areembedded in the transfer hoist belt. Alternatively, the gripper could bebattery powered, and battery recharging would be accomplished throughelectrical contacts when the gripper is raised to the transfer hoistframe. In the case of the battery powered gripper, communications wouldbe wireless, either through radio frequency transmission, or throughlight beam transmission (visible or infra-red).

FIG. 16 shows additional details of the hoist linear drive assembly 137.Plate 170 provides support for horizontal drive motor 169 and hoistlinear rail 165. Linear rail bearings 166 attach to cantilever support138 along with ball nut mount 171. Ball screw 167 attaches to the shaftof the drive motor and passes through ball nut 168 which is held by theball nut mount. As the drive motor shaft is rotated, the ball nut andball nut mount push the cantilever support and hoist laterally as itslides on the rail 165 and bearings 166. For clarity, cables that supplypower and control signals to the hoist are not shown.

Alternative components could be used in the hoist linear drive assembly.For example, the rotary type motor 169 could be replaced with a linearmotor having permanent magnets mounted on plate 170 and a windingassembly attached to the sliding cantilever support block.Alternatively, a leadscrew and nut could replace the ball screw and ballnut, or the linear bearing could be replaced by a pair of parallel guideshafts and tubular bearings.

FIGS. 2 and 3 show details of the bearing assembly that guides andsupports the storage shelves. Several companies, such as THK Co., LTDand Bishop-Wisecarver Corporation provide bearing/rail systems that canbe used to support motion around a combination of straight and curvedrail or track. THK Co. provides a product called “Straight-Curved GuideHMG”, and Bishop-Wisecarver provides their “PRT Track System” withcurved and straight sections. Several methods are known in the art formoving between curved and straight rail sections, and the drawings inFIGS. 2 and 3 are but one example. A bearing plate 121 would support astorage shelf. Each bearing plate would be connected by a pin and aroller plate bearing 145 to each of two roller plates 144. The rollerplates 144 can freely pivot about roller plate bearing 145 and eachmount 2 rollers 143, each of which can rotate on a bearing. The rollersare spaced such that they provide a lateral force that grabs the railfrom each side. As the bearing truck moves around the curved rail theroller plate can pivot to allow unhindered motion. The rail can take onseveral structural configurations, so long as a track is provided forcompleting a loop.

FIG. 18 shows a storage system with two levels of storage loops that arevertically stacked. Upper level storage 149 has active ports 117 a and118 a. Lower level storage 150 has active ports 117 b and 118 b. Thefigure shows a FOUP 130 ready to be loaded on to active shelf 117 b,which is extended. Active port 117 a, which is above active port 117 b,must be retracted for OHT vehicle 131 to have unobstructed delivery ofthe FOUP to active port 117 b, however active ports 118 a or 118 b couldbe extended, for example, with a FOUP ready to be picked up by an OHTvehicle. A multi-level storage system of this type could have more thantwo levels, with different locations and quantity of storage shelves.FIG. 18 shows the storage system 100 mounted directly below the ceilingmounted OHT, however, the storage system could be at any elevation. Thestorage system 100 could be supported by a floor-based structure, aceiling structure, the AMHS structure, or a combination thereof. Thestorage system could also be supported by the structure of a tool orother fab facility feature.

FIGS. 20a, 20b, and 20c are simplified side views of the storage systemwith an active port that show how it could transfer FOUPs with differentbasic types of AMHS. The arrows show the path of the FOUP duringtransfer. FIG. 20a shows an AMHS 151 that is located to the side of thestorage system. This type of AMHS has a transfer device built into itthat can load the FOUP on to the extended active port 117 which can thenretract and transfer the FOUP to a storage shelf 110. FIG. 20b shows anAMHS 155 (such as OHT) that lowers the FOUP on to the active port 117,which then retracts and transfers the FOUP to a storage shelf 110. FIG.20c shows an AMHS 156 without integral transfer device that is locatedto the side of a storage system. This AMHS type requires an externaltransfer device 152 that can pick up the FOUP from the AMHS 156 and moveit to active port 117, where it can then be moved to storage shelf 110.

FIGS. 21a, 21b, and 21c are simplified side views of the storage systemwithout active ports that show how it could transfer FOUPs withdifferent basic types of AMHS. The arrows show the path of the FOUPduring transfer. FIG. 21a shows an AMHS 151 that is located to the sideof the storage system. This type of AMHS has a transfer device builtinto it that can load the FOUP directly on to storage shelf 110. FIG.20b shows an AMHS 155 (such as OHT) that lowers the FOUP directly on tostorage shelf 110. FIG. 20c shows an AMHS 156 without integral transferdevice that is located to the side of a storage system. This AMHS typerequires an external transfer device 152 that can pick up the FOUP fromthe AMHS 156 and move it directly to storage shelf 110.

FIGS. 22 and 23 are simplified plan views that show the relative floorspace used by a conventional stocker, and by a storage system of thepresent invention. Each of these figures is showing one level of storagepositions, and either the conventional stocker 157 or the storage system100 could have multiple levels of the shown FOUP arrangement. In FIG.22, conventional stocker 157 has ten FOUPS 130 arranged in two rows offive FOUPs. The two rows of FOUPs are separated by stacker robotclearance space 161 that is required to move stacker robot 158horizontally for access to the stored FOUPs. Stacker robot 158 hasvertical column 159 that moves stacker robot arm 160 vertically to alignwith each level of storage. Stacker robot end space 162 is required forvertical column 159 when accessing the leftmost FOUPs in the storagelevel. Stacker robot clearance space 161 must be wide enough toaccommodate a FOUP plus parts of the robot arm as it is rotated 180degrees between storage positions on either side of the clearance space161. In contrast, the storage system 100 of the present design shown inFIG. 23 uses much less floor area for the storage of ten FOUPs 130.Storage system 100 does not require a stacker robot, therefore theclearance spaces 161 and 162 in FIG. 22 are eliminated, resulting in amuch denser arrangement.

FIGS. 22 and 23 also show the improved efficiency of motion for thestorage system 100 of the present invention. To retrieve a FOUP fromstorage location 163 in FIG. 22, the stacker robot 158 must first movehorizontally to align with the storage location, then motors in thestacker robot arm 160 extend the arm under the FOUP, then a motor liftsthe arm with the FOUP, then the arm motors retract the arm and FOUP, andthen the stacker robot can move horizontally to the desired destinationport. In FIG. 23, the storage system 100 of the present invention onlyhas to operate a single motor to move all FOUPs simultaneously until theshelf an FOUP that was at position 164 is moved 3 or 4 positions, forexample, using only a fraction of the time that the conventional stockerused for retrieval of a FOUP.

FIG. 24 shows an embodiment of the current invention that is used as astand alone tool storage system without a ceiling mounted AMHS deliverysystem. Hoist linear drive 137 (e.g., horizontal track) has beenlengthened to extend it over the area to the side of the assembly 200 ofthe tool, allowing transfer hoist 136 to be positioned over manualloading station 172 located to the side of the tool. The manual loadingstation is therefore at a side the tool. As used herein, “at a side”means that the manual loading station can be near the tool, so long asthe manual shelf is beside or near the container load zone. In this casethe containers are placed on the manual loading station where they canbe picked up by the transfer hoist and then raised to an upper position.From that position the transfer hoist moves laterally to align over atool loadport 134 or an active port 117, then lowers and deposits thecontainer on the loadport or active port. The transfer hoist can movecontainers between; a) manual loading port and active port, b) activeport and loadport, or c) manual loading port and loadport. The manualload station is shown having a manual load shelf, with features forholding, engaging or connecting to a container when placed thereon. Inone embodiment, the features are pins, and the pins mate tocorresponding underside recessed sections of a container. Furthermore,the manual load station can take on various configurations, such asmoveable floor based transport or handling systems. For example, railguided vehicles, automated transfer carts, or human placed containers onmovable transport systems. Still further, for clarity, the manual loadshelf does not need to be part of a manual load station, and anystructure of mechanism that can support a container and receivecontainers can function as a manual load shelf.

FIG. 24 shows the type of container and loadport used for 300 mm siliconwafers, however, the same concept would apply to containers used forother sized wafers, such as 200 mm or 450 mm. 200 mm wafer containersdiffer in that they have a bottom opening door, but they have a similartop handle for engagement with the transfer hoist and they are loaded onto a horizontal support surface on the tool, therefore they do notsignificantly change the operation of the manual loading or bufferdelivery.

The use for the system in FIG. 24 would be to allow a human operator toload multiple containers into the storage system 100. The storage systemcould then load the containers onto the tool as needed and remove thecontainers to the storage system 100 after processing, using thetransfer hoist. The operator could then retrieve the processedcontainers of wafers at a later time, minimizing the need for theoperator to more frequently manually load and unload each loadport. Sometype of operator interface, preferably an operator interface 173 mountedon the manual loading station, would allow the operator to enter storageand container information during the loading or unloading process. Themanual loading station could have automatic container identificationmeans to allow for identification of the container as it is loaded orunloaded. Several different methods are common in the semiconductorindustry, such as bar code readers, RFID (radio frequencyidentification), and infra-red communication to a battery powered,container mounted identification module.

It is also possible that a stand alone system as shown in FIG. 24 couldbe used for the processing and storage of containers of any horizontalsubstrate. There would be no substantial difference with the systemshown in FIG. 24 as long as the tool had horizontal loading surfaces forthe transfer hoist to lower the container on to, and the tool had anaccess port that would allow access to the substrates for loading intothe process tool by the tool's substrate handling apparatus.

FIGS. 25 and 26 show yet another embodiment of the current inventionthat uses stationary shelves 174 a and 174 b positioned at the sides ofthe storage system 100, providing a simpler method for OHT drop off andpick up of containers. For example, one or more of the stationaryshelves 174 can be oriented beside the frame of the storage systemassembly. In this manner, a stationary shelf 174 will be positionedoutside of the track of the storage system assembly. Still further, thestationary shelf can be coupled to the storage system assembly in manyways. One way is to couple to the frame of the storage system assemblyor another structure. Unlike active port 117 which can be in a retractedposition, stationary shelves 174 a and 174 b are always in a positionunder the travel of the OHT vehicle and the transfer hoist because theyare rigidly mounted to stationary structural elements, such as thestructure of storage system 100. In one example embodiment, thestationary shelves 174 are also oriented in the same direction as a loadport shelf of the tool below and an extended active port 117.

For purposes of clarity, it should be understood that the stationaryshelf can be connected to any location that is proximate to the storagesystem assembly 100. For instance, the stationary shelf can be connectedon the same side as a face of one of the active port 117 or 118, so longas the stationary shelf does not block vertical hoist access or OHTaccess to a load port shelf. The face, however, is where no active portexists, such as to the right of active port 118.

If OHT vehicle 131 arrives at tool assembly 200 for the purpose ofdropping off a container, transfer hoist 136 may be in the process ofmoving laterally over the active port 117 or the loadports 134 a, 134 b,or 134 c during the transfer of containers between the storage system100 and the loadports. In that case the OHT would be required to wait ifit had to interact with the active ports, but the stationary shelves areoutside of the transfer hoist's range of motion during storage system toloadport transfers, so the OHT will be free to deposit the container atthe stationary shelf without concern for interaction with these othertransfer operations.

With the stationary shelves installed there would be no need for the OHTvehicle to stop over the loadports unless there was a malfunction in theoperation of the storage system or transfer hoist. In that case, theAMHS and storage system could be put in an alternate mode of operation.The storage system operation would be disabled, the transfer hoist wouldbe moved over one of the stationary shelves, and the OHT vehicles woulddeliver containers directly to the tool's loadports. While this type ofoperation would not take advantage of the capabilities of the storagesystem, it would still allow the tool to operate while the malfunctionis being corrected.

Another advantage of the stationary shelves is that a container can beplaced on one for pick up by an OHT vehicle without occupying theposition on an active port. The timing of the arrival of an OHT vehiclefor pick up is uncertain, and placement of the container on a stationaryshelf eliminates the need for the container to occupy an active port,which could interfere with other transfers.

Yet another advantage of the stationary shelves, if two or more areused, is that one could be designated as a drop off shelf and the otheras a pick up shelf. OHT vehicles usually travel only in one directionalong OHT rail 132. The drop off shelf could be designated as the shelf174 a that the OHT vehicle first traverses as it approaches the tool,and the pick up shelf could be the shelf 174 b positioned after the OHTvehicle travels further, which is usually the shelf on the other side ofthe tool. If shelf 174 a was empty and shelf 174 b had a container to bepicked up, a single OHT vehicle could drop off a container at shelf 174a and then, after a short move, pick up the waiting container at shelf174 b. This method can reduce the overall traffic of OHT vehicles byreducing the number of scheduled OHT vehicle moves due to thecombination of a container drop off and a container pick up into asingle pass by a vehicle.

Thus, the transfer hoist can: (i) pick or place containers to or fromthe stationary shelf; or (ii) pick or place containers to or from theload port shelf; or (iii) pick or place containers to or from thestationary shelf and the load port shelf; or (iv) pick or placecontainers to or from a port plate of the storage system assembly, thestationary shelf, or the load port shelf. Still further, the OHT isconnected to track above the storage system assembly, the horizontaltrack of the transfer hoist is oriented below the track of the OHT, thestorage shelves, the port plate, and the stationary shelf are orientedbelow the transfer hoist, and the load port shelf is oriented below thestorage shelves, the port plate, and the stationary shelf. And, each isinstalled in a room having a floor over which the tool is installed. Theroom can be a fab, a laboratory, a clean room, or any structure.Referencing items to be below or above can be with regard to areference, and the reference can be a floor of the room.

FIG. 26 shows how OHT rail 132, OHT vehicle 131, transfer hoist 136,stationary shelf 174 a, and loadport 134 a occupy substantially the samevertical plane.

FIG. 27 shows a Multi-Tool application for the storage system. A storagesystem could be located between or across two tools 200 a and 200 b,allowing the transfer hoist 136 to move containers between tools withoutassistance from OHT vehicles, and providing tool-to-tool buffering. Thiscould be very efficient if, for example, a metrology step is requiredafter a process step. The container could go back into the storagesystem after the process, in a queue, to be measured by the metrologytool when it is next available. The transfer hoist 136 could extend overboth tools by extending the hoist linear drive 137. In one embodiment, ahorizontal track is oriented above at least part of the storage systemassembly. In another embodiment, the horizontal track extends beyond aside of the storage system assembly. Extending beyond a side shall meanany side, and can include extending beyond more than one side of thetool or storage system assembly. In one example, the horizontal trackcan be oriented over one or more tools. A transfer hoist is connected tothe horizontal track to enable the transfer hoist to move along thetrack over the one or more tools, and the transfer hoist is configuredto pick or place containers. In still another embodiment, the horizontaltrack extends beyond a side of the storage system assembly, whereby asection of horizontal track is at least partially oriented over asection of a conveyor. A transfer hoist connected to the horizontaltrack can then move along the track over the section of the conveyor toenable picking or placing of containers.

The storage system assembly could be supported from the floor, the toolstructure, the OHT frame, or the ceiling. The storage system could beover both tools, in-between the tools, or mounted over one of the tools.Either way, the hoist linear drive would be extended so that transferhoist could be positioned over all of the loadports on both tools.

It may be desirable to have a safety shield made out of clear plastic orother material to restrict the operator from the vertical load areaunless they are manually accessing a container. There could be accessdoors with signal switches to prevent the transfer hoist from verticalmotion if a door is open. Another possibility is that the shield wouldbe open at the loadports, but only to the height of the top of thecontainer. This would prevent an operator from leaning into the verticaltravel area while still allowing hand access at the container height. Ifthis open concept was used it could be combined with optical“break-the-beam” sensors across the openings at the loadports to signalthe transfer hoist controller to prevent vertical motion if an operatorwas breaking the beam of the sensor at an opening. A third option wouldbe to use a full “light curtain” in front of the tool without anyphysical shield. If the operator interrupted any of the light beams,transfer hoist operation would be restricted.

There are a variety of ways that the storage system could be interfacedto the tool and the fab automation system, however, there are two commonways of organizing the interfaces; a) as a system controlled by the fabManufacturing Control System (MCS), or b) as a system integrated andcontrolled directly by the tool. In case b), the tool would communicatewith the fab's control systems to indicate empty storage locations andcontainers that have completed processing. Typically a tool willcommunicate only that it has a completed container for removal and thefab's control systems will keep track of the status of the tool'sstorage locations (loadports). The tool usually does not determine ifcontainers should be delivered for processing—the scheduling of new workis done by the fab systems. In this “tool controlled” method, the toolwould somehow represent to the fab systems that it has more containerdelivery positions than the number of loadports that it has, and allowthe fab to associate delivery/retrieval positions as well as processinstructions with these locations. This “tool controlled” method may nothave all its messages conform to SEMI standard protocols, and mayrequire customization of the fab communication interfaces. In case a),the tool would essentially operate as it does without a storage system.Delivery of containers for storage in the storage system, and transferof containers to and from the tool loadports would be controlled by SEMIstandard message protocols between the fab Manufacturing Control System(MCS) and the storage system. This MCS control could be done using SEMIE88 (Specification for AMHS Storage SEM), the standard that is usuallyused to control transactions with a stocker. E88 messages cover theinteractions required to load, unload, and track containers into astorage system such as a stocker, or in this case, a storage system ofthe present invention. There are E88 commands to move material in thestocker to a port, and these could be used to move a container from astorage location in the storage system to a loadport. Another optionwould be to use E82 commands (Specification for Interbay/Intrabay AMHSSEM) rather than E88 for the movement of the containers between thestorage system and the loadports.

There will be many storage system operations that can be improved withefficient coordination of the OHT and the transfer hoist motions.Ideally, the fab material control system would send a message to thestorage system as the OHT was approaching the storage system,identifying its access port (loadport #, active port#, or stationaryshelf#) and action (pick up or drop off container #). This could be donethrough the storage system fab communication interface, such as anEthernet port, or directly, with a wireless link (such as Wi-Fi IEEE802.11 or Bluetooth IEEE 802.15) between the OHT and the storage system.The message could be transmitted to the storage system when the OHTvehicle passed a pre-identified path position near the storage system.By sending this “approach notification” message, the storage systemcould prepare for the OHT's arrival in several ways, including; a)clearing access to the identified loadport, b) extending the identifiedactive port to receive a container, c) extending identified active portwith identified container for OHT pick up, or d) clearing the identifiedstationary shelf in preparation for arrival of a container.

If the coordination methods described above are not available, thenthere would be increased probability that the transfer hoist or activeshelves would be in an interfering operation when an OHT vehicle arrivesat the tool. OHT operation would usually be given priority because anyOHT delay could cause other OHT through traffic to stop, however, shortOHT delays might be acceptable if the OHT was on a bypass rail ratherthan the main rail that all through traffic was on. An OHT bypass is asection of OHT rail that diverges from the main rail and runs by a toolor group of tools, and then merges again with the main OHT rail.

All OHT material transfers to loadports or stocker ports are interlockedwith signals that conform to the SEMI E84 standard. If there was nopre-notification, the loadports on the tool would not have informationabout the pending arrival of an OHT vehicle, up until the time when thefirst E84 signals are asserted by the OHT. These are usually transmittedthrough an optical link that is aligned when the OHT vehicle iscorrectly positioned over the loadport (or shelf or port). The E84standard prescribes an exchange of several signals that assure that eachstep of a transfer is allowed and that it is successfully completed.

There are many ways that a conveyor delivery system could be integratedwith the operation of the storage system of the present invention. SeeFIG. 28 and FIG. 29 for one example of a configuration. The mainconveyor segment 175 transports containers along a row of tools/EFEMS,with side delivery segments 176 a and 176 b that are at the side of thetool/EFEM. In the example, as seen in FIG. 29, the container 177 wouldstop at the end of the side delivery segment at a position that is underthe transfer hoist so that it can be picked up by the transfer hoist anddelivered to an active port or a tool loadport. In one embodiment, thestop position can be a section of the conveyor. If there also is an OHTsystem in use it also could also be aligned over the conveyor stopposition as well as the loadports and active ports, creating a veryflexible automation system. For example the conveyor could be used tolink a small group of tools with high transfer rates, while the OHT isused to move the containers out of the area. The side delivery conveyorcould also be used to queue a short line of containers before they arepicked up by the transfer hoist. This might be useful if the transferhoist is busy with other transfer operations, allowing the main conveyorto offload 2 or 3 more containers that were scheduled for deliverywithout causing any disruptions or bypassing on the main conveyor line.

FIG. 28 shows two side conveyor segments 176 a and 176 b, one on eachside of the tool. One could be for container delivery and the othercould be for a container exit segment, however, the association ofcontainer delivery and removal to individual side conveyors could bedynamically changed if the situation was called for. An example ofdynamic association would be to have both segments deliver containers ifthe storage system needed to be filled from an empty state as quickly aspossible, in which case both side segments could fill up their queues tothe limit with arriving containers. After the storage system was filled,one of the side segments could be changed to an exit segment.

FIGS. 28 and 29 show the main conveyor segment placed behind the storagesystem, however, it could just as easily be in front of the storagesystem over the aisle in front of the loadports. The side conveyorsegments would still be perpendicular and they still would extend to apoint where they deliver the container to a position that is under thetransfer hoist. The intersection between the main conveyor section andthe side sections require some type of transfer device, many of whichare already well known. For example, there could be a rotating conveyorturntable 178 with a short conveyor section mounted on it. The containerwould travel on the main conveyor until it is on the turntable, theturntable would then turn and allow the container to roll off in thedirection of the side conveyor.

Most of the drawings show, for simplification, only a tool EquipmentFront End Module (EFEM) without a tool connected. FIGS. 28 and 29 showwhere the tool can be located behind the EFEM. In the descriptionsabove, a tool would include all parts connected to it includingloadports, or EFEM or the storage system itself.

Broadly speaking, an OHT system is a material delivery system for asemiconductor manufacturing facility. OHT vehicles carry containers ofsemiconductor wafers while traveling on a ceiling supported rail system.The containers (FOUPS in the case of 300 mm wafers) are gripped by theirtop flange while traveling in the OHT vehicles along the rail system.The OHT vehicle can stop at loadports or other transfer stations andlower the gripping mechanism, along with the container, using a set ofretractable cables. When the container contacts the loadport surface, itis accurately positioned because it mates with a set of kinematic pinsthat protrude from the loadport's support surface. In a similar way, anempty gripping mechanism can be lowered on to the top flange of acontainer on a loadport, grip the top flange, and raise the container tothe OHT vehicle by retracting the cables. The OHT vehicle can loadcontainers to transfer stations of various heights simply by adjustingthe length of the cable retraction or extension for that station. Thistype of adjustment is done by a human controlled set up (“teaching thestation”), followed by storage of the adjustment values in the OHT'scontrol system.

It should be appreciated that the above described mechanisms and methodsfor storing and accessing semiconductor wafer containers are forexplanatory purposes only and that the invention is not limited thereby.It should be apparent to those skilled in the art that certainadvantages of these described mechanisms and methods have been achieved.It should also be appreciated that various modifications, adaptationsand alternative embodiments may be made within the scope and spirit ofthe appended claims of the present invention.

What is claimed is:
 1. A storage system comprising: (a) a frame of thestorage system located above a frame of an assembly of a tool; (b) abase plate connected to the frame of the storage system, the base plateis connected to a rotating mechanism driven by a motor, the base plateis oriented to define a horizontal plane, wherein the base plate islocated below the motor; (c) a plurality of storage shelves coupled tothe rotating mechanism for horizontal movement of the storage shelves,each of the storage shelves has a shelf plate with a plurality of shelffeatures for supporting a container; wherein the storage shelves movetogether to one or more positions; and (d) an active port assemblyconnected to the frame of the storage system, the active port assemblyhaving a port plate, the port plate having a plurality of port features,the port plate positioned at one of the positions, the active portassembly further including: (i) a horizontal motion assembly defining anextended position outside of the frame of the storage system and aretracted position inside the frame of the storage system; and (ii) avertical motion assembly coupled to the port plate, the vertical motionassembly defining an up position and a down position, the verticalmotion assembly being coupled to the horizontal motion assembly; whereinthe down position places the port plate below one of the shelf plates;wherein the up position places the port plate above the one of the shelfplates.
 2. The storage system as recited in claim 1, further comprisinga stationary shelf coupled to the frame of the storage system forsupporting the container or another container, the stationary shelf fordelivery of a container or another container from an overhead transportvehicle.
 3. The storage system as recited in claim 2, wherein thestationary shelf extends in a direction of a load port of the tool. 4.The storage system as recited in claim 2, wherein the stationary shelfis non-retractable with respect to the frame of the storage system. 5.The storage system as recited in claim 1, further comprising astationary shelf coupled to the frame of the storage system forsupporting the container or another container, the stationary shelf usedfor facilitating pickup of the container or another container by anoverhead transport vehicle.
 6. The storage system as recited in claim 5,wherein the stationary shelf extends in a direction of a load port ofthe tool.
 7. The storage system as recited in claim 5, wherein thestationary shelf is non-retractable with respect to the frame of thestorage system.
 8. The storage system as recited in claim 1, wherein theframe of the storage system extends along a hoist linear drive, along aportion of the tool, and along a portion of an additional tool, theframe of the storage system located below the hoist linear drive, thehoist linear drive connected to a transfer hoist for driving thetransfer hoist in a linear direction along the hoist linear drive, thetransfer hoist used to transfer the container between the tool and theadditional tool or between the tool and an overhead transfer vehicle orbetween the additional tool and the overhead transfer vehicle.
 9. Thestorage system as recited in claim 8, wherein the additional tool islocated beside the tool.
 10. The storage system as recited in claim 8,wherein the transfer hoist is for transferring the container from thetool to the port plate, or from the additional tool to the port plate,or from the port plate to the tool, or from the port plate to theadditional tool, or for transferring the container or another containerbetween the tool and the additional tool via the port plate.
 11. Thestorage system as recited in claim 1, wherein the frame of the storagesystem is positioned at least partially over the tool and at leastpartially over an adjacent tool, the frame of the storage system locatedbelow a linear drive coupled to a hoist, the hoist sliding over the tooland the adjacent tool so that the container in the storage system isexchanged with either the tool or the adjacent tool or an overheadtransfer vehicle.
 12. The storage system as recited in claim 1, whereinthe container is to be transferred between the port plate when in theextended position and an overhead transport vehicle, wherein theoverhead transport vehicle is attached to an overhead transport rail,wherein the overhead transport rail is attached to a ceiling of a room.13. The storage system of claim 1, wherein the extended positionfacilitates a transfer of the container between the port plate and atransfer hoist, wherein the transfer hoist is coupled to a hoist lineardrive for moving in a linear direction along the hoist linear drive,wherein the hoist linear drive is connected to the frame of the storagesystem, wherein the frame of the storage system is located above aloading station, wherein the loading station is located adjacent to theframe of the tool for receiving the container from the port plate viathe transfer hoist or for transferring the container to the port platevia the transfer hoist.
 14. A storage system comprising: (a) a frame ofthe storage system located above a frame of an assembly of a tool, thetool used for processing a substrate; (b) a base plate connected to theframe of the storage system, the base plate is located under a rotatingmechanism and below a motor, the base plate is oriented to define ahorizontal plane; and (c) a plurality of storage shelves, each of theplurality of storage shelves has a shelf plate for supporting acontainer, and each of the storage shelves being coupled to the rotatingmechanism to enable guiding of the storage shelves to one or morepositions in a horizontal motion, wherein the frame of the storagesystem includes an inner portion and an outer side, wherein the rotatingmechanism and the motor are contained within the inner portion of theframe of the storage system; (d) an input stationary shelf located abovethe frame of the tool and attached to the outer side at one end of theframe of the storage system for supporting a container or anothercontainer; (e) an output stationary shelf located above the frame of thetool and attached to the outer side at another end of the frame of thestorage system for supporting a container or another container.
 15. Thestorage system of claim 14, wherein the input stationary shelf isconfigured for delivery of a container from an overhead transportvehicle or pickup of a container by a hoist coupled to the frame of thestorage system, and the output stationary shelf is configured for pickupof a container by the overhead transport vehicle or drop-off of acontainer by the hoist.
 16. The storage system of claim 14, wherein theouter side includes a length and a width, the input stationary shelflocated at a position along the width.
 17. The storage system of claim14, wherein the outer side includes a length and a width, the inputstationary shelf located at a position along the length.
 18. The storagesystem of claim 14, further comprising a port plate that is coupled tothe frame of the storage system, wherein the input stationary shelffacilitates a transfer of a container from an overhead transport vehicleto the input stationary shelf, wherein the overhead transport vehicleextends from an overhead transport rail coupled to a ceiling of a room,wherein the frame of the storage system is coupled to a transfer hoist,wherein the transfer hoist is configured for pickup of a container fromthe input stationary shelf, wherein the transfer hoist is coupled to ahoist linear drive that moves along the hoist linear drive to enable atransfer of a container or another container from the input stationaryshelf to the port plate or to a load port of the tool.
 19. The storagesystem of claim 14, wherein the outer side includes a length and awidth, the output stationary shelf located at a position along thewidth.
 20. The storage system of claim 14, wherein the outer sideincludes a length and a width, the output stationary shelf located at aposition along the length.
 21. The storage system of claim 14, furthercomprising a port plate that is coupled to the frame of the storagesystem, wherein the output stationary shelf facilitates a transfer of acontainer from a hoist to the output stationary shelf, wherein the frameof the storage system is coupled to the hoist, wherein the outputstationary shelf is further configured for delivery of a container to anoverhead transport vehicle, wherein the overhead transport vehicleextends from an overhead transport rail coupled to a ceiling of a room,wherein the transfer hoist is coupled to a hoist linear drive that movesalong the hoist linear drive for enabling a transfer of a container oranother container from the port plate or from a load port of the tool tothe output stationary shelf.
 22. A storage system comprising: a baseplate connected to a frame of the storage system, wherein the frame ofthe storage system is located along a horizontal plane above a frame ofa tool, the tool including load ports for transferring substratesbetween a container and the tool; a motor coupled to the base plate,wherein the base plate is located below the motor; a movement mechanismcoupled to the base plate; a plurality of storage shelves coupled to themovement mechanism for horizontal movement of the storage shelves, eachof the storage shelves for supporting a container; and an active portconnected to the frame of the storage system, the active port forextending away and toward one of the storage shelves for moving acontainer out of and onto one of the storage shelves.
 23. The storagesystem of claim 22, further comprising: a linear drive; and a transferhoist connected to the linear drive via a cantilevered support, whereinthe transfer hoist is configured to slide along the linear drive,wherein the transfer hoist has a plurality of transfer hoist beltsextending from a hoist frame and a hoist gripper connected to thetransfer hoist belts for gripping the container.
 24. The storage systemof claim 22, further comprising: a conveyor attached to the frame of thestorage system, wherein the conveyor is configured to transfer thecontainer between an overhead transport vehicle and a transfer hoist,wherein the transfer hoist is coupled to a hoist linear drive for movingin a linear direction along the hoist linear drive, wherein the hoistlinear drive is coupled to the frame of the storage system, wherein theoverhead transport vehicle is attached to an overhead transport rail,wherein the overhead transport rail is attached to a ceiling of a room.